Detected signal shows strong ties to room temperature fluctuations and drift of optical properties of ellipsometric components including light source.

Paper

Water absorption on the polished stainless steel surface studied by ellipsometry

Citations: 0

1996

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Abstract

A photoelastic modulation (PEM) ellipsometry is employed to study a water adsorption on SUS 310 surface in air as a function of relative humidity change. A natural evaporation type humidity generation method and a divided-flow type humidity generator is used to control the humidity in a chamber in room temperature condition. Detected signal shows strong ties to room temperature fluctuations and drift of optical properties of ellipsometric components including light source. Under even such a rough environment, adsorption occured and optical response is detected as relative humidity changes.

Authors

H. Nham

Journal

Journal name not available for this finding

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