Finding
Paper
Abstract
Successful control of the conductivity of tetrahedrally bonded amorphous carbon (ta-C) by incorporation of N during film growth is reported. N is introduced into the films during growth by injecting N 2 gas into a plasma stream formed by a carbon cathodic vacuum arc. X-ray-photoemission-spectroscopy studies of films prepared over a range of N 2 partial pressures show that the N concentration varies from 2% to below the detection limit. Spectroscopic studies using electron-energy-loss spectroscopy confirm that the ta-C films with N contents up to 1 at. % retain their predominantly tetrahedral amorphous structure
Authors
Veerasamy, Yuan, Amaratunga
Journal
Physical review. B, Condensed matter