L. N. Son, T. Tachiki, T. Uchida
Dec 13, 2012
2012 37th International Conference on Infrared, Millimeter, and Terahertz Waves
VOx thin films were fabricated on fused quartz substrates by metal-organic decomposition. In R-T characteristics, VOx films indicated an abrupt phase transition around 52°C with a resistivity change of 3-4 orders and temperature coefficient of resistance of 4.4-4.8 %/K at 300 K.