D. Jin, R. Dinu, T. Parker
Jul 7, 2003
Journal name not available for this finding
New crosslinked clad polymers were developed for electro-optic polymer modulators with special attention paid to properties such as refractive index tunability, optical loss, and conductivity. These cured polymers showed relatively low optical loss at 1550 nm and desirable conductivity. The clads were used to fabricate electro-optic devices having mode profiles closely matched to that of optical fibers in order to reduce insertion loss. A new hardmasking technique was developed to define Mach-Zehnder rib waveguides by photolithography and dry etching with high reliability and surface smoothness. The hardmasking technique demonstrated flexibility in defining waveguides made with electro-optic polymers having different reactivity towards etchant gasses.