Chee-Wei Tok, N. Duan, F. Sun
Dec 1, 2012
2012 Photonics Global Conference (PGC)
This paper demonstrates the fabrication of silicon APD array for clinical imaging applications. The fabrication process is compatible with CMOS platform. The measurement results show they are able to achieve low dark current (before breakdown) and operate linearly after breakdown (Geiger mode). Further improvement will be implemented in design and fabrication to improve the leakage current.