Silicon avalanche photodiode array fabrication for imaging application

doi:10.1109/PGC.2012.6458011

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Silicon avalanche photodiode array fabrication for imaging application

Chee-Wei Tok, N. Duan, F. Sun

Dec 1, 2012

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Journal

2012 Photonics Global Conference (PGC)

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Key Takeaway

Key Takeaway: Silicon APD arrays for clinical imaging applications show low dark current and linear operation after breakdown, with potential for further improvement in design and fabrication.

Abstract

This paper demonstrates the fabrication of silicon APD array for clinical imaging applications. The fabrication process is compatible with CMOS platform. The measurement results show they are able to achieve low dark current (before breakdown) and operate linearly after breakdown (Geiger mode). Further improvement will be implemented in design and fabrication to improve the leakage current.

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