4-(tert-Butoxycarbonyloxy)benzyl p-toluenesulfonates as acid amplifiers applicable to chemically amplified photoresists

doi:10.1002/(SICI)1521-3935(20000101)201:1<132::AID-MACP132>3.0.CO;2-3

Paper

4-(tert-Butoxycarbonyloxy)benzyl p-toluenesulfonates as acid amplifiers applicable to chemically amplified photoresists

Published 2000 · Hiromitsu Ito, K. Ichimura

Macromolecular Chemistry and Physics

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25

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Abstract

Aiming at the improvement of photosensitivity of photoimaging materials triggered by photoacid species, some 4-(tert-butoxycarbonyloxy)benzyl p-toluenesulfonates were synthesized as acid amplifiers, which generated p-toluenesulfonic acid autocatalytically in the presence of the acid in a non-linear manner. Among of the compounds tested, 4-(tert-butoxycarbonyloxy)-3-nitrobenzyl p-toluenesulfonate was superior for the present purpose because of its thermal stability in the absence of acid. When this compound was coupled with a chemically amplified photoresist system, photosensitivity was raised up to about 5 fold.

Study Snapshot

4-(tert-Butoxycarbonyloxy)benzyl p-toluenesulfonates can improve photosensitivity of photoimaging materials by up to 5 fold when combined with chemically amplified photoresist systems.

PopulationOlder adults (50-71 years)

Sample size24

MethodsObservational

OutcomesBody Mass Index projections

ResultsSocial networks mitigate obesity in older groups.

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4-(tert-Butoxycarbonyloxy)benzyl p-toluenesulfonates as acid amplifiers applicable to chemically amplified photoresists

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