S. Uchino, T. Ueno, T. Iwayanagi
Jul 31, 1987
Citations
0
Influential Citations
2
Citations
Journal
Journal of imaging technology
Abstract
Water soluble aromatic diazonium salts have been evaluated as photobleachable dyes for contrast enhancement lithography using a g-line stepper. The diazonium salts used in this experiment are zinc chloride salts of 4-(N, N-dimethylamino)-3-ethoxybenzene diazonium chloride, 4-morpholino-2, 5-di-isopropoxybenzene diazonium chloride, and 4-(N, N-dime thylamino)-2, 5-dimethylbenzene diazonium chloride. An aqueous solution of diazonium salt and polyvinyl pyrrolidone is used as a contrast enhancement material. An improved resist profile is obtained with this CEL material when a g-line stepper is used. Resist contrast is discussed in terms of such optical characteristics as the quantum yield of bleaching and the molar absorption coefficient for the materials. The thermal stability of diazonium salts in an aqueous solution is also examined.