R. Gardiner, Duncan W. Brown, P. Kirlin
May 31, 1991
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Journal
Chemistry of Materials
Abstract
Abstract : The 2,5,8,11,14-pentaoxaheptadecane (tetraglyme) adducts of barium complexes of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H(hfacac(), 1,1,1,- trifluoro-2,4-pentanedione (Htfacac) and 2,2,6,6-tetramethyl-3,5-heptanedione (H(thd)) have been prepared and characterized by X-ray crystallography, H and C nmr spectroscopies, melting and sublimation points, and elemental analysis. The thermal stability of the complexes is related to their solid state structure in which the coordination number around the barium atom is nine with a monocapped, twisted square prism structure. Metalorganic chemical vapor deposition experiments were performed using the 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate and 1,1,1-trifluoro-2,4-pentanedionato complex; the 2,2,6,6-tetramethyl-3,5- heptanedionate complex dissociated prior to sublimation. The as-deposited barium fluoride films were characterized by scanning electron microscopy and energy dispersive x-ray spectroscopy.