Hiromitsu Ito, K. Ichimura
2000
Citations
0
Influential Citations
25
Citations
Journal
Macromolecular Chemistry and Physics
Abstract
Aiming at the improvement of photosensitivity of photoimaging materials triggered by photoacid species, some 4-(tert-butoxycarbonyloxy)benzyl p-toluenesulfonates were synthesized as acid amplifiers, which generated p-toluenesulfonic acid autocatalytically in the presence of the acid in a non-linear manner. Among of the compounds tested, 4-(tert-butoxycarbonyloxy)-3-nitrobenzyl p-toluenesulfonate was superior for the present purpose because of its thermal stability in the absence of acid. When this compound was coupled with a chemically amplified photoresist system, photosensitivity was raised up to about 5 fold.