Y. Fukuda, Yoshiko Suzuki, J. Murata
Jan 2, 1994
Citations
0
Influential Citations
5
Citations
Journal
Applied Surface Science
Abstract
Abstract Adsorption and decomposition of triethylindium on a GaP(001) surface have been studied using X-ray photoelectron spectroscopy (XPS) and ultra-violet photoelectron spectroscopy (UPS), and effects of electron beam irradiation on the adsorption are also examined. We find that TEI adsorbs molecularly on the surface at RT. It decomposes to form InP and metallic In, and hydrocarbons are completely removed from the surface at 400°C. The atomic compositions of carbon and indium on the surface are increased with electron beam irradiation during TEI adsorption. The irradiation breaks significant numbers of bonds between ethyl-ligands and In atoms, which results in some of the ligands being removed from the surface and hydrocarbons bonding to Ga atoms at RT. The stable carbon species are formed with the irradiation, leading to the existence of them on the surface at 400°C.