D. Chadwick, J. McAleese, K. Senkiw
Aug 1, 1996
Citations
0
Influential Citations
14
Citations
Journal
Applied Surface Science
Abstract
Abstract MOCVD grown CeO 2 films using the precursor Ce(fod) 4 (where fod-H = 1,1,1,2,2,3,3-heptafluoro-7,7-dimethyloctane-3,5-dione) have been analysed by XPS. Residual fluorine was found to be in the form of fluoride and an organo-related fluorine species which converted rapidly to fluoride under application of the XPS technique. At the same time the CeO 2 spectrum developed the presence of Ce 3+ . The rate of conversion was found to be sample dependent.