Ge Chang-chun
2011
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Journal
China Surface Engineering
Abstract
Tungsten hexacarbonyl is a coordination compound consisting of tungsten and carbonyl.It can be evaporated and dissociated at a very low temperature.Tungsten hexacarbonyl is very important to prepare advanced material by controlling dissociation way,time,atmosphere,and so on.In this paper,the recent progress of tungsten powder,films and device is reviewed.The principle of thermal dissociation of tungsten hexacarbonyl is described.Besides,the future development of tungsten hexacarbonyl composite films,large-scale tungsten device is also prospected.