R. Yang, J. Bachmann, M. Reiche
May 29, 2009
Citations
0
Influential Citations
32
Citations
Journal
Chemistry of Materials
Abstract
Antimony oxide and sulfide are obtained in atomic layer deposition (ALD) mode by reaction of tris(dimethylamido)-antimony with ozone or hydrogen sulfide at mild temperatures and with large growth rates. Thin films deposited with those methods are chemically pure and stoichiometric. Nanostructures of large aspect ratios are also accessible.