Liang G. Guang
2004
Citations
0
Influential Citations
0
Citations
Journal
The Chinese Journal of Nonferrous Metals
Abstract
Rhodium(Ⅲ) acetylacetonate [Rh(acac)_3], a precursor for preparing Rh layers by CVD technique, was prepared. Its spectroscopic properties were investigated via UV-vis, IR, ()~1HNMR and MS and its thermal decomposition behavior via TG-DTA and GC-MS. The results show that, Rh(acac)_3 is a low spinning and inert coordination compound, the characteristics of carbonyls in the ligand disappear due to the formation of conjugate π bonds in Rh~(3+)—acac~- chelating ring, after bombarded by fast atoms, the coordination bonds break and the organic covalent bonds are splited with the formation of ()~(103)Rh~+, chemical shifts of H nuclei go downward to low field because of electron-attraction of Rh~(3+) and electron-cyclic effect in the chelating rings, and it sublimates and decomposes at (247 ℃) and 245 ℃ in air and argon, respectively. Series of new complexes, different with the temperatures, appear in the course of the decomposition, according to which it is suggested that a better deposit temperature should be (300 ℃) when plating Rh layers via CVD technique with Rh(acac)_3 as the precursor.