Li Huamao, Z. Hongyan, Xia Zhongfu
Sep 25, 1996
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9th International Symposium on Electrets (ISE 9) Proceedings
Abstract
In this paper, an advanced study on the chemical surface modification by dichlorodimethylsilane (DCDMS) was carried out. Different cleaning processes were tried to improve the surface state of the SiO/sub 2/ film after chemical surface treatment by DCDMS. The stability of the space charges stored in these samples was investigated and the surface components of the samples were analyzed.