S. Biswas, O. Shalev, K. Pipe
Aug 6, 2015
Citations
0
Influential Citations
10
Citations
Journal
Macromolecules
Abstract
Parylene films are commonly used as transparent, flexible coatings in electronic devices and biomedical applications, exhibiting barrier properties against corrosion, low dielectric constant, and moisture resistance. Reactive vapor deposition of parylene results in conformal coverage of features at room temperature, which is advantageous for passivating, for example, organic optoelectronic devices. Conventional parylene deposition methods, however, coat surfaces virtually indiscriminately and utilize separate chambers for vaporization, pyrolysis, and polymerization, resulting in a large footprint and limited processing integration ability, especially at a laboratory scale. Here, we demonstrate the vaporization and pyrolysis of the di-p-xylylene (parylene dimer) in a single compact nozzle, producing a jet of monomer that polymerizes into a film upon contact with the substrate at room temperature. A guard flow jet is employed to shield the reactive monomer molecules en route to the substrate, thereby enabli...