Edward J. Donahue, D. Schleich
Jun 1, 1992
Citations
0
Influential Citations
28
Citations
Journal
Journal of Applied Physics
Abstract
We report the first successful use of metalorganic chemical vapor deposition (MOCVD) in the fabrication of ferromagnetic oxide thin films. A substituted acetylacetonate barium complex has been used with ferrocene in a horizontal hot wall MOCVD system to deposit both polycrystalline and c‐axis preferred films of BaFe12O19. These films were examined for crystallinity, morphology, composition, and magnetic properties. Their magnetic properties were found to be consistent with films prepared by other techniques.