C. Wu, F. Lu
Nov 1, 2001
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Journal
Thin Solid Films
Abstract
Abstract Barium titanate films were deposited by electrochemical oxidation during which 0.5 M barium acetate was used as the electrolyte over a wide electrolytic voltage range of 3–90 V. The microstructure of the films was controlled primarily by the applied electrolytic voltage. The structure-sensitive voltage ranges were first determined by the voltage scanning electrolysis method; the films were then prepared to the preset voltages by the potentiodynamic method. The BaTiO 3 thin films possessed uniformly distributed spherical-like small particles at voltages under 30 V because of the dissolution and crystallization mechanism. At voltages from 45 to 60 V, X-ray diffraction results showed favorable generation of the rutile TiO 2 phase. The formation of crater-shaped and large-grained BaTiO 3 films at voltages above 60 V may be attributed to the anodic spark deposition mechanism.