Qiang Huang, T. Lyons, W. Sides
Oct 10, 2016
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0
Influential Citations
26
Citations
Journal
Journal of The Electrochemical Society
Abstract
The effect of dimethylglyoxime on Co electrodeposition was investigated with cyclic voltammetry, chronopotentiometry, quartz microbalance as well as electrochemical impedance. A potential dependent suppression effect was observed at low potential with a breakdown of the suppression at high potential, resulting in a hysteresis in CV. The addition of dimethylglyoxime not only causes a fast and strong suppression in potential transients but also modifies the impedance spectra. Additional capacitive loops and inductance loops emerged depending on the applied potential, suggesting a competitive adsorption between different surface adsorbed intermediates. A relaxation of suppression effect was observed in absence of agitation and a strong suppression was re-established upon agitation. A reverse relation between Co deposition rate and rotation rate was observed when the rotation rate is below a critical value, providing a path to enable the preferential deposition at the bottom of a small damascene feature.