L. Christophorou, J. Olthoff
Jul 12, 2001
Citations
1
Influential Citations
60
Citations
Journal
Journal of Physical and Chemical Reference Data
Abstract
Besides its use in plasma etching, perfluorocyclobutane (c-C4F8) has potential applications as a gaseous dielectric, especially in gas mixtures (e. g., see Refs.1-3). Perfluorocyclobutane is also of environmental interest because it is a global warming gas.4 For these reasons, we have recently synthesized and assessed electron collision cross-section and electron transport-coefficient data for this gas.5 The results of this critical assessment are summarized and briefly discussed in this paper.