T. Kropewnicki, P. Kohl
Jun 4, 1998
Citations
0
Influential Citations
3
Citations
Journal
Journal of Vacuum Science and Technology
Abstract
The use of liquid hydrazine (N2H4) as a nitrogen source for nitridation reactions has been restricted because of safety, purity, and difficulties in using a liquid source. Hydrazine cyanurate (HC) is a stable solid complex of N2H4 which can be easily handled and purified before use and which evolves pure N2H4 upon heating, thus making it a promising source of N2H4 for nitridation reactions. In this article, a process for the synthesis of HC has been developed which decreases the H2O content of the evolved N2H4 from 10% when H2O was used as the solvent in the synthesis of HC to 0.7% by replacing H2O with dimethylsulfoxide as the solvent in the synthesis of HC. The use of the purified HC is demonstrated as a solid source in the nitridation of (100) GaAs substrates at 200 °C in a low pressure chemical vapor deposition reactor. The nitridated GaAs surfaces were analyzed by x-ray photoelectron spectroscopy and were found to be primarily comprised of GaN, GaAs, and Ga2O3. The ratio of the constituent peak heigh...