Hiraoka Yoshiko, M. Mashita
Dec 2, 1994
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0
Influential Citations
20
Citations
Journal
Journal of Crystal Growth
Abstract
Abstract The dimer structures of trimethylaluminum (Al(CH 3 ) 3 , TMA) and dimethylaluminumhydride (AlH(CH 3 ) 2 , DMAH) have been investigated using ab initio molecular orbital calculations. It has been shown that the structure of the TMA dimer is C 2h ; on the other hand, that of the DMAH dimer has been calculated to be D 2h . The dissociation energy of the TMA dimer was only 4.2 kcal/mol, while that of the DMAH dimer was 32.3 kcal/mol, which is considerably larger than the TMA dimer. These results indicate that the dimer contributes directly to surface reactions when DMAH is used as the source material for ALE.