Hiromitsu Ito, T. Ikeda, K. Ichimura
Aug 1, 1993
Citations
0
Influential Citations
6
Citations
Journal
Macromolecules
Abstract
Oxazole rings attached to a copolymer backbone, which was composed of 2-[3-(methacryloyloxy)propyl]-4,5-diphenyl-1,3-oxazole and N-isopropylacrylamide, were transformed efficientlytothe corresponding N,N-dibenzoylcarboxamide derivatives in a thin film by photooxidation using various dyes as photosensitizers. This photo induced transformation was found to be applicable to a panchromatic photoresist with positive tone by development with an aqueous solution of amines to dissolve the exposed areas of the fiilm. The photooxidation had the quantum efficiency for generation of singlet oxygen in the range 0.2-0.7 depending upon the sensitizers used in the system