T. Murata, K. Itatani, F. Howell
Nov 1, 1993
Citations
1
Influential Citations
22
Citations
Journal
Journal of the American Ceramic Society
Abstract
Submcrometer-scale magnesium nitride (Mg3N2) powder was prepared by low-pressure chemical vapor deposition, i.e., the reaction of Mg vapor with mixed NH3–N2 gases at 800°C under a pressure of ∼1 kPa. The mixing ratios of NH3–N2 gases were 0% NH3–100% N2 (pure N2), 20% NH3–80% N2, 40% NH3–60% N2, 60% NH3–40% N2, 80% NH3–20% N2, and 100% NH3–0% N2 (pure NH3). The reactions between Mg vapor and NH3–N2 gases produced platy Mg3N2 particles <0.2 μm and acicular particles with long-axis length of ∼0.2 μm, whereas the reaction of Mg vapor with pure NH3 gas produced spherical Mg3N2 particles with diameters of ∼0.1 μm.