W. Suchanek, M. Yoshimura
Jan 20, 2005
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Influential Citations
15
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Journal
Journal of the American Ceramic Society
Abstract
SrTiO 3 thin films have been prepared on titanium substrates using strontium acetate solutions in newly constructed flow-system equipment by the hydrothermal-electrochemical method. The synthesis parameters (temperature of 120°-200°C and flow rate of 1-40 mL/min) allow fabrication of dense, single-phase films with grain sizes in the range of 80-340 nm by controlling nucleation and/or growth rates. The flow can be closed, enabling easy recycling of the solutions used. This processing route may serve as an inexpensive and environmentally friendly way of fabrication of single-phase SrTiO 3 thin films as well as functionally graded ferroelectric materials.