Jiang Yue-ming
2012
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Journal
Sulphur Phosphorus & Bulk Materials Handling Related Engineering
Abstract
With the limitation of fluorite resource in China,fluorine in the phosphorite is an important way of obtaining fluorine resource.Electronic-grade hydrofluoric acid,as one of the fluorine fine chemicals,is one of the most used electronic chemicals in the manufacturing of semi-conductors.The application areas,quality criteria,purification technology and current status of RD in and out of China for electronic-grade hydrofluoric acid are outlined.And it is pointed out that fluosilicic acid,which is a by-product from the wet-process phosphoric acid production,can be used to produce anhydrous hydrogen fluoride,which is a raw material for production of electronic-grade fluosilicic acid.In this way,it will realize comprehensive utilization of resource,develop cycling economy,extend the industrial chain of the phosphorous chemistry,and offers major strategic significance to the protection of fluorite resource,and also significant economic and social benefits.