Phillip L. Clancy, D. Cowles, Piyamit Chitrathorn
Mar 8, 2013
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Abstract
Boron tribromide (BBr3) is a colorless, fuming liquid widely used in the synthesis of pharmaceuticals, photovoltaic manufacturing, and as a dopant in semiconductor manufacturing. Particularly in the latter application, the purity of the compound with regard to trace metals contamination is of extreme importance since very small amounts of impurities can have a dramatic effect on the function of semiconductor circuits. Boron tribromide must be analyzed at the parts per billion level by Inductively-couple Plasma Mass-spectrometry (ICPMS) to ensure that the material is sufficiently pure for use in semiconductor production.