S. Motojima, C. Ohashi, Tatsuhiko Hattori
May 1, 1989
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Influential Citations
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Journal
Journal of Crystal Growth
Abstract
Whiskers and pillar crystals of Cr3Si and Cr5Si3 have been in-situ grown by the reaction of chromium powder, hexchlorodisilane and hydrogen at a temperature range of 850–1200°C on the inner wall of the quartz boat in which chromium powder was dispersed. The pillar crystals obtained have generally a hollow which penetrated the crystal axis. It is supposed that pillar crystals with square or regular hexagonal cross sections are Cr3Si (cubic) and tetragonal or deformed hexagonal is Cr5Si3 (tetragonal). These chromium silicide crystals are supposed to deposit mainly on the boat by the following in-situ reactions: (1) Si2Cl6 + H2 → SiClx + HCl; (2) Cr powder + HCl → CrCl2 + H2; (3) CrCl2 + SiClx + H2 → Cr3Si + Cr5Si3 + HCl. The maximum size of the crystals obtained is 5–6 mm in length and 10–20 μm in thickness at 1200°C for 60 min.