Qu Jing-ping
2007
Citations
0
Influential Citations
0
Citations
Journal
Photographic Science and Photochemistry
Abstract
2-methyl adamantine-2-yl methacrylate and 2-ethyl adamantine-2-yl methacrylate are two important monomers of matrix polymer for 193 nm photoresist. The two compounds are synthesized based on utilizing methylmagnesium iodide(ethylmagnesium iodide) as Grinard reagent reacted with 2-adamantone to provide 2-methyl(ethyl) adamantine-2-yl which then esterified with methacryloyl chloride in the presence of NaH to provide the target compounds with the yields of 50—60%. The structures of the compounds are confirmed by 1HNMR, IR, MS and Elementary Analysis. The hydrolysis test was carried out using TsOH·H2O as catalyst and the hydrolysis mechanism was discussed. The calculated hydrolysis rate constants k are -1.52 and -3.90, respectively.