P. Muraoka, Daniel Byun, J. Zink
Jan 29, 2000
Citations
0
Influential Citations
6
Citations
Journal
Journal of the American Chemical Society
Abstract
have been identified.The fluorinated acetylacetonate ligands (1,1,1,5,5,5-hexafluoro-2-4-pentanedionate) hfac) that were used in the latter studiesprovide good precursor volatility and allow for facile transportin the gas phase, but they may also result in fluorine and/or carboncontamination of the final deposit.