T. Fujigaya, Y. Shibasaki, M. Ueda
2001
Citations
0
Influential Citations
8
Citations
Journal
Journal of Photopolymer Science and Technology
Abstract
A simple amorphous molecule, tri(3, 5-di-tert-butoxycarbonyloxybenzyl) 1, 3, 5-benzenetetracarboxylate (4) was prepared from 1, 3, 5-benzenetricarbonyl trichloride (3) and 3, 5-di(tert-butoxycarbonyloxy)benzyl alcohol (2). Compound 4 can form an uniformm transparent film by spin-casting on silicone wafer and the film has a good transparency above 300nm wavelength. The chemically amplified photoresist system based on 4 containing 5wt% of diphenyliodonium 9, 10-dimethoxyanthracene-2-sulfonate (DIAS) showed a sensitivity of 19mJ/cm2 and a contrast of 17 with 365nm light.